ScopeVistec Electron Beam
Official name: Vistec Electron Beam GmbH
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Details
Jena 07743 , Germany
Accreditation
Focuses on dimensional calibration of line scales and distances, with primary expertise in coordinate measurement techniques applied to structured substrates such as hardmasks, measuring edge positions and structural deviations with uncertainty levels from 0.005 µm.
Accreditation Details
Accreditation Body
DAkkS
Number
D-K-18737-01-01
Status
ActiveSince
19 December 2025
Accreditation is granted under EU Regulation 765/2008 and assessed against ISO/IEC 17025. Data sourced from official DAkkS records.
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Test Capabilities (18)
| Standard Reference | Description | Category |
|---|---|---|
| (Hartschichtmasken) | (Hartschichtmasken) | Dimensional / Geometric |
| 10 µm | > 10 µm | Dimensional / Geometric |
| Kreisdurchmesser bei halber | Kreisdurchmesser bei halber | Dimensional / Geometric |
| Kreisdurchmesser bei halber 10 µm | Kreisdurchmesser bei halber 10 µm | Dimensional / Geometric |
| Position | Position | Dimensional / Geometric |
| Positionen und Abstände | Positionen und Abstände | Dimensional / Geometric |
| Strukturbreiten bei halber | Strukturbreiten bei halber | Dimensional / Geometric |
| Strukturhöhe | Strukturhöhe | Dimensional / Geometric |
| Winkel | Winkel | Dimensional / Geometric |
| abweichungen ( LRD ) | abweichungen ( LRD ) | Dimensional / Geometric |
| chung ( RON t) | chung ( RON t) | Dimensional / Geometric |
| chungen ( RON q) | chungen ( RON q) | Dimensional / Geometric |
| gerichteten (bidirektionalen) 150 mm x 150 mm | gerichteten (bidirektionalen) 150 mm x 150 mm | Dimensional / Geometric |
| gleichgerichteter Kanten | gleichgerichteter Kanten | Dimensional / Geometric |
| positionen von Strukturen | positionen von Strukturen | Dimensional / Geometric |
| quadratischer Mittelwert | quadratischer Mittelwert | Dimensional / Geometric |
| ten (Hartschichtmasken) | ten (Hartschichtmasken) | Other |
| − Permanentes Laboratorium | − Permanentes Laboratorium | Other |
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